Morgan Advanced Materials Expands Large Area CVD Capabilities for Sic and PBN Products Used in Production of Semiconductor Materials
Morgan can now manufacture CVD SiC sheets in sizes as large as 100 x 100 millimeters square with thicknesses up to 20 millimeters – a 25 percent increase over what has previously been available. Monolithic CVD SiC discs can be produced in diameters up to 340 mm in with thicknesses up to 12 mm – dimensions well suited to many etch applications.
PBN plate is also now available in sizes up to 350 mm x 200 mm x 1 mm, a 35 percent increase over standard available sizes. Morgan’s high quality PBN plates are an excellent choice for heating arrays for MOCVD reactors, for which the materials offer a very high erosion resistance and provide a tenfold decrease in particulate compared to conventional graphite components.
These new material sizes are an enabling technology that allow customers to extend process lifetimes and add value to equipment through reduced maintenance downtime.
For further information on our CVD and PBN products, visit: www.morgantechnicalceramics.com/CVD-PBN