Morgan Advanced Materials Provides Extended Electrostatic Chuck Life Through Replaceable, Wear-Resistant Films
These thin, wear-resistant films, made of diamond-like-carbon (DLC) and other nanocomposite materials, are adjusted to meet specific resistivity requirements of the ESC while protecting electronic layers and extending the overall life of the part. They have a broad range of chemical resistance, meet chamber process compatibility requirements, and can withstand high-temperature heated chuck applications.
The hard-coats can be applied to new or refurbished ESCs, even for ESCs originally designed without a sacrificial wear layer. The technical films are available for CVD, PVD, etch and ion implant processes. The films feature mesa patterning for low defectivity and can be used in most high temperature processes.
For more information about our sacrificial wear layers for electrostatic chucks please visit our dedicated website.